The key element and most complex process step in every multilayer interconnect technology is the via
- an electrical connection between two adjacent metal layers separated by a dielectric material. |
| In the conventional technologies a dielectric sheet is used as base material, in which the vias are formed using drilling (etching or punching) and holeplating process. |
| ISM ALOXTM process is much simpler and do not require drilling and hole plating. |
| The starting material in the ISM process is a conductive aluminum sheet. |
| The first step in the process is masking the top and bottom of the sheet using conventional lithography techniques. |
| The vias are formed using anodization of the sheet through the whole thickness of the sheet. |
| The exposed areas are converted into aluminum oxide which is ceramic in nature and a highly insuling dielectric material. |
| The protected unexposed areas remain as aluminum elements-the connecting vias. |
| Using this innovative process a multilayer low cost ceramic board is formed. |
The complete three metal layer core contains an internal aluminum layer, top and bottom copper layers with through vias and blind vias incorporated in the structure. |
The technology is of best qualities
- a very simple and low cost production process; excellent thermal performance product, superior mechanical and electrical properties. |

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